High-selectivity anisotropic etching of single-crystal...

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Diamond and Related Materials 2018 / 5

High-selectivity anisotropic etching of single-crystal diamond by H plasma using iron catalysis

Liu, Kang, Lv, Zhijun, Dai, Bing, Shu, Guoyang, Zhao, Jiwen, Liu, Benjian, Wang, Weihua, Xue, Jingjing, Yao, Kaili, Sun, Mingqi, Gao, Ge, Wang, Yang, Zhu, Jiaqi
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Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2018.04.026
Date:
May, 2018
File:
PDF, 1.69 MB
english, 2018
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