Thermal CVD of homoepitaxial diamond using CF4 and F2

Thermal CVD of homoepitaxial diamond using CF4 and F2

Rudder, R.A., Posthill, J.B., Markunas, R.J.
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Volume:
25
Year:
1989
Language:
english
Journal:
Electronics Letters
DOI:
10.1049/el:19890818
File:
PDF, 227 KB
english, 1989
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