[IEEE 2017 IEEE 3rd Information Technology and Mechatronics Engineering Conference (ITOEC) - Chongqing (2017.10.3-2017.10.5)] 2017 IEEE 3rd Information Technology and Mechatronics Engineering Conference (ITOEC) - The analysis of influence factors of impedance in inductively coupled plasma
Liao, Yangfan, Jin, XingYear:
2017
Language:
english
DOI:
10.1109/itoec.2017.8122365
File:
PDF, 332 KB
english, 2017