Front-surface fabrication of moderate aspect ratio micro-channels in fused silica by single picosecond Gaussian–Bessel laser pulse
Liu, Xin, Sanner, Nicolas, Sentis, Marc, Stoian, Razvan, Zhao, Wei, Cheng, Guanghua, Utéza, OlivierVolume:
124
Language:
english
Journal:
Applied Physics A
DOI:
10.1007/s00339-018-1634-1
Date:
February, 2018
File:
PDF, 1.40 MB
english, 2018