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Structural and optical properties of a-C:H:O:Cl and a-C:H:Si:O:Cl films obtained by Plasma Enhanced Chemical Vapor Deposition
Fernandes, Isabela Cristina, Hadich, Tayan Vieira, Amorim, Milena Kowalczuk Manosso, Turri, Rafael Gustavo, Rangel, Elidiane C., Dias da Silva, José Humberto, Durrant, Steven F.Volume:
214
Language:
english
Journal:
Materials Chemistry and Physics
DOI:
10.1016/j.matchemphys.2018.04.097
Date:
August, 2018
File:
PDF, 1.37 MB
english, 2018