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High power impulse magnetron sputtering and its applications
YUAN, Yan, YANG, Lizhen, LIU, Zhongwei, CHEN, QiangVolume:
20
Language:
english
Journal:
Plasma Science and Technology
DOI:
10.1088/2058-6272/aa9e48
Date:
April, 2018
File:
PDF, 3.56 MB
english, 2018