Effect of post deposition annealing and post metallization annealing on electrical and structural characteristics of Pd/Al 2 O 3 /6H-SiC MIS capacitors
E., Papanasam, Kailath, Binsu J.Volume:
35
Language:
english
Journal:
Microelectronics International
DOI:
10.1108/mi-10-2016-0070
Date:
April, 2018
File:
PDF, 475 KB
english, 2018