[IEEE 2018 IEEE Micro Electro Mechanical Systems (MEMS) - Belfast, United Kingdom (2018.1.21-2018.1.25)] 2018 IEEE Micro Electro Mechanical Systems (MEMS) - Single-resonator, time-switched FM MEMS accelerometer with theoretical offset drift complete cancellation
Marra, Cristiano R., Ferrari, Filippo M., Karman, Saleh, Tocchio, Alessandro, Rizzini, Francesco, Langfelder, GiacomoYear:
2018
Language:
english
DOI:
10.1109/MEMSYS.2018.8346497
File:
PDF, 1010 KB
english, 2018