[IEEE 2018 IEEE Micro Electro Mechanical Systems (MEMS) -...

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[IEEE 2018 IEEE Micro Electro Mechanical Systems (MEMS) - Belfast, United Kingdom (2018.1.21-2018.1.25)] 2018 IEEE Micro Electro Mechanical Systems (MEMS) - Improved sensitivity of ionic liquid-based pressure sensor for body-on-a-chip using simulation-based 3D lithography

Hirai, Yoshikazu, Tsuji, Yusuke, Kamei, Ken-ichiro, Tsuchiya, Toshiyuki, Tabata, Osamu
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Year:
2018
Language:
english
DOI:
10.1109/MEMSYS.2018.8346602
File:
PDF, 598 KB
english, 2018
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