[IEEE 2016 17th International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM) - Erlagol, Altai Republic, Russia (2016.6.30-2016.7.4)] 2016 17th International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM) - Technological volumes for ultrasonic processing of liquid media

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