[IEEE 2018 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (EIConRus) - Moscow (2018.1.29-2018.2.1)] 2018 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (EIConRus) - Analysis of aerodynamic efficiency of air conditioning and filtration systems for cleanrooms in microelectronic industry
Gavrilin, Vyacheslav A., Zakharov, Artem N., Karakeyan, Valery, Germogenov, AlexanderYear:
2018
Language:
english
DOI:
10.1109/eiconrus.2018.8317476
File:
PDF, 235 KB
english, 2018