![](/img/cover-not-exists.png)
[IEEE 2017 International Conference on Optical MEMS and Nanophotonics (OMN) - Santa Fe, NM, USA (2017.8.13-2017.8.17)] 2017 International Conference on Optical MEMS and Nanophotonics (OMN) - Batch production of silicon fiber-top cantilever devices
Rector, J. H., Beekmans, S. V., Slaman, M., Verdoold, R., Iannuzzi, D.Year:
2017
Language:
english
DOI:
10.1109/omn.2017.8051500
File:
PDF, 326 KB
english, 2017