Atomic-Layer-Deposition of Indium Oxide Nano-films for Thin-Film Transistors
Ma, Qian, Zheng, He-Mei, Shao, Yan, Zhu, Bao, Liu, Wen-Jun, Ding, Shi-Jin, Zhang, David WeiVolume:
13
Language:
english
Journal:
Nanoscale Research Letters
DOI:
10.1186/s11671-017-2414-0
Date:
December, 2018
File:
PDF, 3.39 MB
english, 2018