[IEEE 2017 40th International Convention on Information and Communication Technology, Electronics and Microelectronics (MIPRO) - Opatija, Croatia (2017.5.22-2017.5.26)] 2017 40th International Convention on Information and Communication Technology, Electronics and Microelectronics (MIPRO) - Practical aspects of TMU based analysis for scatterometry model referencing
Hartig, Carsten, Urbanowicz, Adam M., Vaid, Alok, Ebersbach, Peter, Fischer, Daniel, Melzer, Robert, Sanchez, Francisco, Mezerette, David, Katz, Yinon, Sendelbach, MatthewYear:
2017
Language:
english
DOI:
10.23919/MIPRO.2017.7966541
File:
PDF, 669 KB
english, 2017