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Structure design and experimental investigation of a multi-function stylus profiling system for characterization of engineering surfaces at micro/nano scales
Tian, Jia, Tian, Yanling, Guo, Zhiyong, Wang, Fujun, Zhang, Dawei, Liu, XianpingVolume:
24
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-018-3794-5
Date:
May, 2018
File:
PDF, 2.53 MB
english, 2018