Application of dual radio frequency inductive coupled...

  • Main
  • 2018 / 5
  • Application of dual radio frequency inductive coupled...

Application of dual radio frequency inductive coupled plasma into CVD diamond growth

Li, Jia-jun, Li, Bin, Zuo, Yong-gang, Liu, Hao, Bai, Yang, Yuan, He-wei, Li, Zhen-rui, Xu, Kai, Chen, Guang-chao
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Language:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2018.04.054
Date:
May, 2018
File:
PDF, 1.05 MB
english, 2018
Conversion to is in progress
Conversion to is failed