Application of dual radio frequency inductive coupled plasma into CVD diamond growth
Li, Jia-jun, Li, Bin, Zuo, Yong-gang, Liu, Hao, Bai, Yang, Yuan, He-wei, Li, Zhen-rui, Xu, Kai, Chen, Guang-chaoLanguage:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2018.04.054
Date:
May, 2018
File:
PDF, 1.05 MB
english, 2018