Effect of electrostatic discharge on semiconductor devices and subsequent annealing of electrostatic defects
M. I. Gorlov, I. V. Vorontsov, A. V. AndreevVolume:
41
Language:
english
Pages:
3
DOI:
10.1007/bf02512129
Date:
January, 1998
File:
PDF, 166 KB
english, 1998