Effect of electrostatic discharge on semiconductor devices...

Effect of electrostatic discharge on semiconductor devices and subsequent annealing of electrostatic defects

M. I. Gorlov, I. V. Vorontsov, A. V. Andreev
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Volume:
41
Language:
english
Pages:
3
DOI:
10.1007/bf02512129
Date:
January, 1998
File:
PDF, 166 KB
english, 1998
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