Compensation of Frequency Split by Directional Lapping in...

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Journal of Micromechanics and Microengineering 2018 / 05

Compensation of Frequency Split by Directional Lapping in Fused Quartz Micro Wineglass Resonators

Wang, Yusheng, Asadian, Mohammad H, Shkel, Andrei M
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Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/1361-6439/aac221
Date:
May, 2018
File:
PDF, 16.52 MB
english, 2018
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