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[IEEE 2018 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (EIConRus) - Moscow (2018.1.29-2018.2.1)] 2018 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (EIConRus) - Correction factor calculation for photomasks in a flexible microassemblies production
Kruchinin, Sergey, Evstafyev, Sergey S., Golovinskiy, Maxim, Musatkin, Alexandr, Vertyanov, Denis V.Year:
2018
Language:
english
DOI:
10.1109/eiconrus.2018.8317411
File:
PDF, 879 KB
english, 2018