Experimental Investigation of Ar Inductively Coupled Plasma...

IEEE Transactions on Plasma Science 2018 / 5 Vol. 46; Iss. 5

Experimental Investigation of Ar Inductively Coupled Plasma in a Closed Low-Pressure Chamber

Song, Zhijie, Xu, Haojun, Wei, Xiaolong, Chen, Zenghui
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Volume:
46
Language:
english
Journal:
IEEE Transactions on Plasma Science
DOI:
10.1109/tps.2018.2817575
Date:
May, 2018
File:
PDF, 1.88 MB
english, 2018
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