Evolution of Models and Algorithms for Calculating the...

Russian Microelectronics 2017 / 12 Vol. 46; Iss. 8

Evolution of Models and Algorithms for Calculating the Parameters of Technological Processes to Obtain Materials for Micro- and Nanoelectronics

Krapukhin, V. V., Kosushkin, V. G., Kozhitov, L. V., Kostishin, V. G., Muratov, D. G., Popkova, A. V.
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Volume:
46
Language:
english
Journal:
Russian Microelectronics
DOI:
10.1134/S1063739717080091
Date:
December, 2017
File:
PDF, 370 KB
english, 2017
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