The Influence of Heat Treatment on the Electrical Characteristics of Semi-Insulating SiC Layers Obtained by Irradiating n-SiC with High-Energy Argon Ions
Ivanov, P. A., Potapov, A. S., Kudoyarov, M. F., Kozlovskii, M. A., Samsonova, T. P.Volume:
44
Language:
english
Journal:
Technical Physics Letters
DOI:
10.1134/S1063785018030197
Date:
March, 2018
File:
PDF, 253 KB
english, 2018