Formation of PZT Structures on Silicon

Bulletin of the Russian Academy of Sciences: Physics 2018 / 3 Vol. 82; Iss. 3

Formation of PZT Structures on Silicon

Seregin, D. S., Baziruvikha, A. -M., Kotova, N. M., Vorotilov, K. A., Delimova, L. A., Zaitzeva, N. V., Myakon’kikh, A. V., Rudenko, K. V., Lukichev, V. F.
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Volume:
82
Language:
english
Journal:
Bulletin of the Russian Academy of Sciences: Physics
DOI:
10.3103/S1062873818030231
Date:
March, 2018
File:
PDF, 482 KB
english, 2018
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