Elimination of Voids at Interface of β-SiC Films and Si...

Journal of Wuhan University of Technology-Mater. Sci. Ed. 2018 / 4 Vol. 33; Iss. 2

Elimination of Voids at Interface of β-SiC Films and Si Substrate by Laser CVD

Zhu, Peipei, Xu, Qingfang, Guo, Han, Tu, Rong, Zhang, Song, Yang, Meijun, Zhang, Lianmeng, Goto, Takashi, Yan, Jiasheng, Li, Shusen
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Volume:
33
Language:
english
Journal:
Journal of Wuhan University of Technology-Mater. Sci. Ed.
DOI:
10.1007/s11595-018-1829-4
Date:
April, 2018
File:
PDF, 2.38 MB
english, 2018
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