[IEEE International Solid State Sensors and Actuators Conference (Transducers '97) - Chicago, IL, USA (16-19 June 1997)] Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) - High-yield wafer chuck for single-sided wet etching of MEMS structures
Brugger, J., Beljakovic, G., Despont, M., Biebuyck, H., de Rooij, N.F., Vettiger, P.Volume:
1
Year:
1997
Language:
english
DOI:
10.1109/sensor.1997.613751
File:
PDF, 353 KB
english, 1997