Evaluations of Mechanical Properties of DLC Film by Indentation Method and the Effect of Substrate
NAKAYAMA, Tomoyuki, SAKAUE, Kenichi, OGAWA, Takeshi, KOBAYASHI, Yoshifumi, TERATANI, TakemaVolume:
58
Year:
2009
Journal:
Journal of the Society of Materials Science, Japan
DOI:
10.2472/jsms.58.833
File:
PDF, 936 KB
2009