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Effect of substrate rotation speed and off-center deposition on the structural, optical, and electrical properties of AZO thin films fabricated by DC magnetron sputtering
Turkoglu, F., Koseoglu, H., Zeybek, S., Ozdemir, M., Aygun, G., Ozyuzer, L.Volume:
123
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.5012883
Date:
April, 2018
File:
PDF, 2.56 MB
english, 2018