(Invited) Materials and Processes for Superconducting...

ECS Transactions 2018 / 04 Vol. 85; Iss. 6

(Invited) Materials and Processes for Superconducting Qubits and Superconducting Electronic Circuits on 300mm Wafers

Papa Rao, Satyavolu S., Hobbs, Christopher, Olson, Stephen, Foroozani, Neda, Chong, Hyuncher, Stamper, Harlan, Martinick, Brian, Ashworth, Dominic, Bunday, Benjamin, Malloy, Matthew, Holland, Eric, Na
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Volume:
85
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/08506.0151ecst
Date:
April, 2018
File:
PDF, 556 KB
english, 2018
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