Damage distribution in Si+-implanted gallium...

Applied Physics A: Materials Science & Processing 1988 / 08 Vol. 45; Iss. 2

Damage distribution in Si+-implanted gallium arsenide-lattice imaging

G. Vitali, M. Kalitzova, N. Pashov, P. Werner, H. Bartsch
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Volume:
45
Language:
english
Pages:
3
DOI:
10.1007/bf02565200
Date:
August, 1988
File:
PDF, 228 KB
english, 1988
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