On-Chip High-Voltage Charge Pump with MEMS Post-Processed Standard 5-V CMOS on SOI for Electroosmotic Flow Micropumps
Okamoto, Yuki, Takehara, Hiroaki, Fujimoto, Koji, Ichiki, Takanori, Ohba, Takayuki, Mita, YoshioYear:
2018
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/LED.2018.2829925
File:
PDF, 592 KB
english, 2018