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10.1541/ieejsmas.123.548
Tanaka, Katsuhiko, Sakurai, Atsushi, Kubota, Teppei, Sakabe, YukioVolume:
123
Year:
2003
Journal:
IEEJ Transactions on Sensors and Micromachines
DOI:
10.1541/ieejsmas.123.548
File:
PDF, 736 KB
2003