Improving the Silicon Surface Passivation by Aluminum Oxide...

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Improving the Silicon Surface Passivation by Aluminum Oxide Grown Using a Non-Pyrophoric Aluminum Precursor

Lee, Chang-Yeh, Wang, Shaozhou, Cui, Xin, Zhang, Tian, Deng, Rong, Khoo, Kean T., Hoex, Bram
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Language:
english
Journal:
physica status solidi (RRL) - Rapid Research Letters
DOI:
10.1002/pssr.201800156
Date:
May, 2018
File:
PDF, 888 KB
english, 2018
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