Design and implementation of two-component cilia cylinder...

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Sensors and Actuators A: Physical 2018 / 5

Design and implementation of two-component cilia cylinder MEMS vector hydrophone

Xu, Qingda, Zhang, Guojun, Ding, Junwen, Wang, Renxin, Pei, Yu, Ren, Ziming, Shang, Zhenzhen, Xue, Chenyang, Zhang, Wendong
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Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2018.05.005
Date:
May, 2018
File:
PDF, 678 KB
english, 2018
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