[IEEE 2017 28th Annual SEMI Advanced Semiconductor...

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[IEEE 2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2017.5.15-2017.5.18)] 2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Nested interconnect macro electrical yield improvement for advanced triple patterning integration

Silvestre, Mary Claire, He, Ming, Mahalingam, Anbu Selvam K M, Child, Craig, Roux, Alycia, Low, Chun Hui, Fisher, Daniel, Zhou, Yue, Park, DeNeil, Karakoy, Mert
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Year:
2017
DOI:
10.1109/asmc.2017.7969189
File:
PDF, 446 KB
2017
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