[IEEE 2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2017.5.15-2017.5.18)] 2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Nontraditional post develop inspection and review strategy for via defects
Daino, Michael, Jain, Ankit, Gao, Weihong, Xie, Qian, Wojtowecz, Michael, Venkatachalam, PanneerselvamYear:
2017
Language:
english
DOI:
10.1109/asmc.2017.7969270
File:
PDF, 591 KB
english, 2017