[IEEE 2016 13th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT) - Hangzhou, China (2016.10.25-2016.10.28)] 2016 13th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT) - A novel methodology of process weak-point identification to accelerate process development and yield ramp-up
Zhuang, Linda, Xu, Jessy, Mengfeng Tsai,, Qing Wei Liu,, Yang, Ellyn, Yifan Zhang,, Sweis, Jason, Chieh Lai,, Hua Ding,Year:
2016
Language:
english
DOI:
10.1109/icsict.2016.7999060
File:
PDF, 600 KB
english, 2016