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[IEEE 2017 75th Device Research Conference (DRC) - South Bend, IN, USA (2017.6.25-2017.6.28)] 2017 75th Annual Device Research Conference (DRC) - Influence of Si(100) surface flattening process on nonvolatile memory characteristics of Hf-based MONOS structures
Kudoh, Sohya, Ohmi, Shun-ichiroYear:
2017
Language:
english
DOI:
10.1109/DRC.2017.7999432
File:
PDF, 371 KB
english, 2017