Preparation and mechanism analysis of polycrystalline...

Journal of Materials Science: Materials in Electronics 2018 / 1 Vol. 29; Iss. 2

Preparation and mechanism analysis of polycrystalline silicon thin films with preferred orientation on graphite substrate

Wei, Lishuai, Chen, Nuofu, He, Kai, Tao, Quanli, Wang, Congjie, Bai, Yiming, Chen, Jikun
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Volume:
29
Language:
english
Journal:
Journal of Materials Science: Materials in Electronics
DOI:
10.1007/s10854-017-8044-6
Date:
January, 2018
File:
PDF, 2.23 MB
english, 2018
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