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Characteristics of Single Cathode Cascaded Bias Voltage Arc Plasma
Ou, Wei, Deng, Baiquan, Zeng, Xianjun, Gou, Fujun, Xue, Xiaoyan, Zhang, Weiwei, Cao, Xiaogang, Yang, Dangxiao, Cao, ZhiVolume:
18
Language:
english
Journal:
Plasma Science and Technology
DOI:
10.1088/1009-0630/18/6/08
Date:
June, 2016
File:
PDF, 2.93 MB
english, 2016