[IEEE 2017 International Conference on Optical MEMS and Nanophotonics (OMN) - Santa Fe, NM, USA (2017.8.13-2017.8.17)] 2017 International Conference on Optical MEMS and Nanophotonics (OMN) - Two-axis quasistatic gimbal-less microscanner with concentrically tilted stationary comb electrodes
Moon, Seunghwan, Lee, Jaekwon, Park, Yangkyu, Kim, Kwanghyun, Lee, Sang-Jin, Lee, Jong-Hyun, Shin, Hyun-Duk, Kim, Hwan-SunYear:
2017
Language:
english
DOI:
10.1109/OMN.2017.8051502
File:
PDF, 354 KB
english, 2017