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[IEEE 2017 IEEE 17th International Conference on Nanotechnology (IEEE-NANO) - Pittsburgh, PA (2017.7.25-2017.7.28)] 2017 IEEE 17th International Conference on Nanotechnology (IEEE-NANO) - A nanofluidics study on nanoscale gas bubble defects in dispensing-based nanoimprint lithography
Li, Da, Ma, Xiaobai, Li, Nan, Hossein, Rokbi, Lu, Wei, Yu, Zhaoning, Liang, XiaoganYear:
2017
Language:
english
DOI:
10.1109/nano.2017.8117426
File:
PDF, 919 KB
english, 2017