[IEEE 2017 IEEE 14th International Conference on Networking, Sensing and Control (ICNSC) - Calabria, Italy (2017.5.16-2017.5.18)] 2017 IEEE 14th International Conference on Networking, Sensing and Control (ICNSC) - Schedulability analysis for dual-armed cluster tools with mixed-processing of multi-variety wafers
Pan, Chunrong, Kun Zhao,, Yi-Sheng Huang,Year:
2017
Language:
english
DOI:
10.1109/ICNSC.2017.8000143
File:
PDF, 378 KB
english, 2017