[IEEE 2017 IEEE 24th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) - Chengdu, China (2017.7.4-2017.7.7)] 2017 IEEE 24th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) - Investigation of Cs+ bombardment effects in ultra-thin oxynitride gate dielectrics characterization by DSIMS
Wang, Yun, Ong, Kian Kok, Mo, Zhi Qiang, Teo, Han Wei, Zhao, Si PingYear:
2017
Language:
english
DOI:
10.1109/IPFA.2017.8060216
File:
PDF, 205 KB
english, 2017