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[IEEE 2018 IEEE Micro Electro Mechanical Systems (MEMS) - Belfast (2018.1.21-2018.1.25)] 2018 IEEE Micro Electro Mechanical Systems (MEMS) - Self-actuating and self-sensing ZNO nanorods/chitosan coated piezoresistive silicon microcantilever for humidit Y sensing
Xu, Jiushuai, Bertke, Maik, Li, Xiaojing, Mu, Haibo, Yu, Feng, Schmidt, Angelika, Bakin, Andrey, Peiner, ErwinYear:
2018
Language:
english
DOI:
10.1109/MEMSYS.2018.8346520
File:
PDF, 720 KB
english, 2018