Study for Phosphorus Contamination to High Voltage...

IEEE Transactions on Semiconductor Manufacturing 2017 / 11 Vol. 30; Iss. 4

Study for Phosphorus Contamination to High Voltage Transistors

Li, Liang, Luo, Qiong, Wu, Zeng Yuan, Tan, Yun Ling, See, Alex, Chua, Soo Cheng, Zhu, Troy, Cheng, Chor Shu
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Volume:
30
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/TSM.2017.2747592
Date:
November, 2017
File:
PDF, 1.30 MB
english, 2017
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