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Multi-Photon Vertical Cross-Sectional Imaging With a Dynamically-Balanced Thin-Film PZT z-Axis Microactuator
Choi, Jongsoo, Duan, Xiyu, Li, Haijun, Wang, Thomas D., Oldham, Kenn R.Volume:
26
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2017.2701798
Date:
October, 2017
File:
PDF, 2.92 MB
english, 2017