[IEEE 2017 IEEE International Ultrasonics Symposium (IUS) - Washington, DC, USA (2017.9.6-2017.9.9)] 2017 IEEE International Ultrasonics Symposium (IUS) - Investigation of 20% Scandium-doped Aluminum Nitride films for MEMS laterally vibrating resonators
Colombo, Luca, Kochhar, Abhay, Xu, Changting, Piazza, Gianluca, Mishin, Sergey, Oshmyansky, YuryYear:
2017
Language:
english
DOI:
10.1109/ultsym.2017.8092916
File:
PDF, 75 KB
english, 2017