Confocal sputtering of conformal α-β phase W films on...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2015 / 01 Vol. 33; Iss. 1

Confocal sputtering of conformal α-β phase W films on etched Al features

Kreikebaum, John Mark, Cabrera, Blas, Yen, Jeffrey J., Brink, Paul L., Cherry, Matt, Tomada, Astrid, Young, Betty A.
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Volume:
33
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4904422
Date:
January, 2015
File:
PDF, 2.87 MB
english, 2015
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