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Comparison and characterization of different tunnel layers, suitable for passivated contact formation
Ling, Zhi Peng, Xin, Zheng, Ke, Cangming, Buatis, Kitz Jammaal, Duttagupta, Shubham, Lee, Jae Sung, Lai, Archon, Hsu, Adam, Rostan, Johannes, Stangl, RolfVolume:
56
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.56.08MA01
Date:
August, 2017
File:
PDF, 1.28 MB
english, 2017