ChemInform Abstract: UNDERCUT ISOLATION-A TECHNIQUE FOR CLOSELY SPACED AND SELF-ALIGNED METALIZATION PATTERNS FOR MOS INTEGRATED CIRCUITS
BERGLUND, C. N., CLEMENS, J. T., NICOLLIAN, E. H.Volume:
4
Journal:
Chemischer Informationsdienst
DOI:
10.1002/chin.197349014
Date:
December, 1973
File:
PDF, 131 KB
1973